SPECIFICATION:
- Electron gun: Tungsten Filament (W)
- Spatial resolution: <3nm
- Magnification: 9x to 500,000x
- Accelerating voltage: 1 – 30kV
- Sample stage: X: 80mm, Y: 80mm, Z: 80mm,
- R: 360°, T: 20 ~ 90
- Detector: SE, BSE
- Vacuum mode: HV, LV (20Pa), VP (10, 20, 30Pa)
- Vacuum system: Turbo pump (300L) + Rotary pump (100L)
- Dimension (W × L × H): 640(W) × 882(L) × 1,432(H) mm, 200kg
FEATURES:
- Panorama v2
- Auto focus
- Auto brightness & contrast
- Auto start
- Signal mixing
- Triple display & Save
- Line profile
- Image filtering
- Annotation tool
- ChamberCam
- Data output format
- JPG, TIFF, BMP
OPTIONS:
- EBSD, STEM
- Coolstage
- LV (20Pa), VP (10 / 20 / 30Pa)
- NanofiberScanner
- Scroll pump
- Air-protection module
- EDS (Oxford, Bruker)