MICRO XRF (A SERIES)- BOWMAN

Origin: America

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The A Series MICRO XRF is designed for precise measurement of the smallest X-ray features in semiconductors and microelectronics. The system supports large PCBs and wafers of any size, with a 7.5 μm FWHM X-ray beam—the smallest in the world for XRF. A dual-camera system with 140X magnification provides detailed imaging, while a programmable X-Y stage moves up to 600 mm with ±1 μm precision. Pattern recognition, auto-focus, and 3D mapping optimize measurement accuracy.

MODEL: MICRO XRF A SERIES 

SPECIFICATION

Element Range: Aluminium 13 to Uranium 92
X-ray excitation: 50 W Mo target Capillary Optics @7.5µm FWHM at 17 KeV

Optional: Cr or W
Detector: Large window Silicon drifted detector with 190eV resolution or better
Number of analysis layers and elements: 5 layers (4 layers + base) and 10 elements in each layer. Composition analysis of up to 30 elements simultaneously
Filters/Collimators: 4 primary filters
Output Focal Depth: Fixed at 0.08″ (2.03mm)
Digital Pulse Processing: 4096 CH digital multi-channel analyzer with flexible shaping time. Automatic signal processing, including dead time correction and escape peak correction
Computer: Intel CORE i5 9th gen. desktop processor, solid state hard drive, 16GB RAM, Microsoft Windows 11 Professional 64bit equivalent
Camera optics: 1/4″ CMOS-1280×720 VGA resolution
Video Magnification: 140X Micro & 7X Digital Zoom: 9X Macro & Table View
Power Supply: 720W, 100~240 volts; frequency range 47Hz to 63Hz
Weight: 1000kg (2200 lbs)
Working Environment: 68°F (20°C) to 77°F (25°C) and up to 98% RH, non-condensing
Programmable XYZ: XYZ travel: 600mm (23.6″) x 600mm (23.6″) x 89mm (3.5″)

XY tabletop: 559mm (22″) x 584mm (23″)

XYZ-axis precision: 1um (40u”)
Internal Dimensions: Height: 102mm (4″), Width: 1397mm (55″), Depth: 1473mm (58″)
External Dimensions: Height: 1778mm (70″), Width: 1473mm (58″), Depth: 1575mm (62″)
Other New Features: Z protection array, Auto focus, Focus laser, Pattern recognition, Semi S2 S8 compliant-ready

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MICRO XRF (A SERIES)- BOWMAN

The A Series MICRO XRF is designed for precise measurement of the smallest X-ray features in semiconductors and microelectronics. The system supports large PCBs and wafers of any size, with a 7.5 μm FWHM X-ray beam—the smallest in the world for XRF. A dual-camera system with 140X magnification provides detailed imaging, while a programmable X-Y stage moves up to 600 mm with ±1 μm precision. Pattern recognition, auto-focus, and 3D mapping optimize measurement accuracy.

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