The A Series MICRO XRF is designed for precise measurement of the smallest X-ray features in semiconductors and microelectronics. The system supports large PCBs and wafers of any size, with a 7.5 μm FWHM X-ray beam—the smallest in the world for XRF. A dual-camera system with 140X magnification provides detailed imaging, while a programmable X-Y stage moves up to 600 mm with ±1 μm precision. Pattern recognition, auto-focus, and 3D mapping optimize measurement accuracy.
The W Series Micro XRF from Bowman features a 7.5 µm FWHM X-ray beam, the smallest in the world for coating thickness analysis using XRF technology. This makes it ideal for measuring small components like BGAs and solder bumps. It includes a dual-camera system with 140X magnification for precision imaging and a secondary camera for live viewing. A programmable X-Y stage with ±1 µm accuracy, along with pattern recognition and auto-focus, enables precise measurements and automated multi-point analysis. The system also offers 3D mapping for coating topography visualization. Standard configurations include a molybdenum anode tube (with optional chromium or tungsten) and a high-resolution Silicon Drift Detector. The instrument can measure up to five coating layers simultaneously and operates with Archer software, which streamlines measurement, reporting, and application setup.
The B Series is a basic XRF measurement system with a top-down design for easy operation. It features a fixed sample stage, requiring users to manually align the test position using video imaging. The sample chamber is similar to the P Series but without a programmable X-Y stage. The system includes a fixed collimator, fixed-focus camera, SDD detector, and a durable micro-focus X-ray tube. Notably, the B Series can be upgraded with additional collimators or a variable-focus camera to enhance analytical flexibility.
The G Series XRF is an ideal choice for laboratories and production lines, especially for users with limited workspace, budget constraints, or a preference for "bottom to top" operation with motorized Z-axis control. Designed to efficiently analyze small samples quickly and easily, this system offers flexibility and high performance in material inspection and evaluation.
The K Series is a high-precision XRF system designed for diverse sample analysis, featuring a large 12″ x 12″ measurable area, programmable X-Y stage, and auto multi-collimator for flexible spot sizes. Its variable-focus camera (0.25″ to 3.5″) and table view navigation enable effortless measurements. For ultra-small features, the poly-capillary optics version offers 15μm resolution, high-precision stage (2µm), and 140x magnification camera with digital zoom. Equipped with an SDD detector and long-life X-ray tube, it ensures accuracy and compliance with ASTM B568, ISO 3497, and IPC-4552
The Bowman L Series is a versatile XRF instrument with a large sample chamber (22″ x 24″ x 13″) and 10″ x 10″ X-Y stage travel. It accommodates large parts or multiple samples and includes a 4-position collimator assembly, variable focus camera, and programmable X-Y stage. The chamber Z-height is 10″ (or 13″ without the stage). It features an SDD detector and a long-life micro-focus X-ray tube.
The M Series delivers high-performance plating thickness measurement for the smallest features, using advanced poly-capillary optics that focus the x-ray beam down to 7.5μm FWHM. It includes a 140x high-magnification camera with enhanced digital zoom, paired with a secondary macro camera for easy navigation. The high-precision programmable X-Y stage enables multi-point measurements, with automatic pattern recognition and 2D mapping for surface topography analysis. The standard setup features 15μm optics, a high-resolution LSDD detector, and a programmable X-Y stage. Due to its close focal distance, samples must be flat.
The O Series combines high performance and ultra-small x-ray spot size (80μm FWHM) using poly-capillary optics, which maximize x-ray flux for higher sensitivity and faster testing of small components or thin coatings. Unlike traditional collimators, this system retains nearly 100% of the tube flux, ensuring superior repeatability in shorter test times. It features a high-resolution SDD detector, 55x video magnification, 7x digital zoom, and a programmable X-Y stage. Due to its close focal distance, samples must be flat. Now available with an extended stage option for greater flexibility.